主要應(yīng)用領(lǐng)域:
主要應(yīng)用于LCD、TFT、CF、Touch Panel、OLED、PDP等平板顯示行業(yè);HDI、FPC等PCB行業(yè)。
Applications:
Mainly used in LCD、TFT、CF、Touch Panel、OLED、PDP and other flat panel display industry;HDI、FPC and other PCB industry.
鉻版精度 Chrome Mask Specifications(Standard Size:430mmx430mm)
精度 / 級別
Items / Class
|
最高精度
Grade 1
|
高精度
Grade 2
|
中精度
Grade 3
|
一般精度
Grade 4
|
最小線寬/線縫
Min.Line/Space Width
|
1.0μm/1.0μm |
5μm/5μm |
10μm/10μm |
20μm/20μm
|
線條精度
CD Control
|
±0.15μm (QZ) |
±0.5μm
|
±1.0μm
|
±2.0μm
|
總長精度
Total Pitch Accuracy
|
±0.5μm(QZ)
|
±1.0μm
|
±2.0μm
|
±2.0μm
|
圖形位置精度
Registration Accuracy
|
±0.5μm(QZ)
|
±1.0μm
|
±2.0μm
|
±3.0μm
|
套合精度
Overlay Accuracy
|
±0.5μm(QZ)
|
±1.0μm
|
±2.0μm
|
±3.0μm
|
垂直精度
Orthogonality
|
±0.75μrad
|
±2.0μrad
|
±3.0μrad
|
±4.0μrad
|
鉻版材料 Substrate(Photomask blank phate)
材料 Material |
Soda Lime Glass、Quartz |
最大尺寸Max. Size |
1100mm×1100mm |
常規(guī)尺寸Normal Size |
406.4mmx457.2mm,420mmx520mm,450mmx550mm,580mmx609.6mm,
609.6mmx711.2mm,620mmx720mm,700mmx800mm,800mmx960mm
|
厚度 Thickness |
2.3±0.2mm,3.0±0.2mm ,4.8±0.2mm ,7.8±0.2mm
5.0±0.2mm (QZ),8.0±0.2mm (QZ) |
鉻膜 Film Type |
Low Reflectance Chrome |
光學(xué)密度Optical Density(λ=450nm) |
Between Plates3.0±0.3 In Plate±0.3 |
反射率Reflectivity(λ=436nm) |
Between Plates10±5% In Plate±2% |
|