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產(chǎn)品規(guī)格 Product Specification |
產(chǎn)品名稱Product Name |
多晶硅片Multi-Crystalline Si wafer |
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文件名稱document Name |
156×156多晶硅片產(chǎn)品規(guī)格 156×156Multi-Crystalline wafer specification |
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材料特性Material properties |
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邊長Dimensions(W×W) |
156×156±0.5mm |
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直徑Diameter |
219.2±0.5mm |
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厚度Thickness |
200±20μm |
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電阻率Resistivity |
1~3Ω×cm |
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拉制方式Drawn way |
澆鑄法Casting method |
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摻雜劑/型號Dopant/ Donor type |
Boron/ P |
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少子壽命Lifetime |
≥1ms |
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氧含量Oxygen Content |
<1×1018/cm3 |
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碳含量Carbon Content |
<5×1017/cm3 |
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線痕Saw marks |
深度≤15mm Depth≤15mm |
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TTV |
≤30mm |
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垂直度Right Angle |
90°±0.3° |
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翹曲度Warp |
≤75mm |
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碎片率Fragmentation rate |
≤3‰ |
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崩邊Edge Chip |
崩邊寬度≤0.3 mm,長度≤0.5mm,數(shù)量≤2個。 Wide≤0.5 mm,Length≤1.0mm,Count≤2。 |
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表面質(zhì)量Surface quality |
產(chǎn)品表面光潔,無油污、裂紋、針孔。 Cleaned,no grease stains, No crack or pinhole |
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微晶Microcrystal |
無 |
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