服務(wù)熱線(xiàn)
4001027270
揚(yáng)州市神州科技有限公司成立于2003年,現(xiàn)有專(zhuān)業(yè)技術(shù)人員40人, 員工50人, 專(zhuān)業(yè)從事射頻等離子體電源的維修、維護(hù)及銷(xiāo)售,主要服務(wù)內(nèi)容包括:為半導(dǎo)體工廠,液晶面板工廠等提供AE, MKS(ENI), DAIHEN, AD-TEC, KYOSAN, RFPP等國(guó)際品牌的射頻電源、直流電源、匹配器、RPS及各類(lèi)半導(dǎo)體設(shè)備維修、銷(xiāo)售、客戶(hù)方案定制與老式機(jī)型替代,并提供現(xiàn)場(chǎng)支持服務(wù)。
公司主要客戶(hù):TSMC, HYNIX, SMIC, IVO, JCAP, MEMSIC, HHNEC, SZ TIANMA, HEJIAN, JA SOLAR,SONY, TOSHIBA, BEST SOLAR等。
二、產(chǎn)品介紹
GHW-12A / 13.56 MHz / 1250 W 射頻電源
Rated Power Output (into 50 ohm load) |
1250 W |
Frequency/Stability | 13.56MHz ±0.005% |
Dynamic Power Range | 10 - 1250W |
Load Impedance Range | Unlimited |
RF Stability/Spurious Output | Unconditionally stable for any load within operational limits < -45dBc |
Harmonic Output & Distortion | < -40dBc |
Load Mismatch Protection | Automatic; forward power limits typically 0.25ms after reverse power reaches a pre-programmed level≤16% of rated power. |
Regulation Tolerance | > 125 W: ±1.5% SP < 125 W: ± 3.0 W |
Primary AC Power Source | 200/208 VAC, 3/PE~ (3W+G) 14 A/PHASE 380/400 VAC, 3/PE~ (3W+G) 7.5 A/PHASE |
Cooling System | Water flow at 2.0 Gal./Min. (7.6 LPM) minimum at +5°C to +35°C. Connections provided to accept 1/4” male (NPT) pipe thread. |
Power Readout | Digital readout displays frequency and forward, reflected and load power. |
Safety Compliance | NRTL Listed: UL3111-1 (1994) CAN/CSA C22.2 No. 1010.1-92 EN61010-1:1993; A2:1995 |
EMC Compliance | EN50081-2: 1992 EN50082-2: 1995 |
Weight | 32.5 lbs. (14.8 kg) |
Dimensions (H x W x D) (excluding handles & connectors) | 3.5” x 19” rack mount x 20.0” (89 x 483 x 508 mm.) |
Remote Interface Connectors | Standard: RS-232 Subminiature Type-D 9-pin digital; optional custom interface cards available. |
RF Output Connector | Type N |
Rack Mounting | EIA (Standard) 19-inch adapters supplied |
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三、品質(zhì)保障
我們所銷(xiāo)售的電源、匹配器及RPS等如無(wú)特殊說(shuō)明,均提供6個(gè)月的免費(fèi)保修服務(wù)。
我們?yōu)殇N(xiāo)售產(chǎn)品提供終身維修服務(wù),并可提供EXCHANGE服務(wù),保證客戶(hù)的生產(chǎn)正常進(jìn)行。
四、運(yùn)輸
我們?yōu)樗谐鰪S的機(jī)器提供最結(jié)實(shí)的包裝,保證運(yùn)輸過(guò)程中機(jī)器的安全。
購(gòu)買(mǎi)之前,如有問(wèn)題,請(qǐng)向我們咨詢(xún)