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一、公司介紹

工程工作現(xiàn)場全景

揚(yáng)州市神州科技有限公司成立于2003年，現(xiàn)有專業(yè)技術(shù)人員40人, 員工50人, 專業(yè)從事射頻等離子體電源的維修、維護(hù)及銷售，主要服務(wù)內(nèi)容包括：為半導(dǎo)體工廠，液晶面板工廠等提供AE, MKS(ENI), DAIHEN, AD-TEC, KYOSAN, RFPP等國際品牌的射頻電源、直流電源、匹配器、RPS及各類半導(dǎo)體設(shè)備維修、銷售、客戶方案定制與老式機(jī)型替代，并提供現(xiàn)場支持服務(wù)。
公司主要客戶：TSMC, HYNIX, SMIC, IVO, JCAP, MEMSIC, HHNEC, SZ TIANMA, HEJIAN, JA SOLAR,SONY, TOSHIBA, BEST SOLAR等。

二、產(chǎn)品介紹

AE CESAR 136 13.56MHz(600W) RF Generator 射頻電源

Specification
Frequency	13.560 MHz +/- 0.005%
Max output power	600 W into a 50??load
Min output power	6 W into a 50??load
Reflected power limit	200 W
Delivered power into mismatch	33% depending on the load impedance
Load impedance	50?Ω
RF connector	50?Ω, N-type, female
RF power regulation mode	P forward, P delivered, or DC selfbias voltage
Regulation (of set point)	1.0 or 0.1% of full-rated power, whichever is greater, into a 50Ωload

Harmonics	-50 dBc at full-rated power
Spurious content	-60 dBc max at full-rated power
Pulse mode	Yes
Pulse repetition frequency	1 to 30 kHz
Pulse duty cycle	1% to 99%

AC line voltage (1-phase)	230 VAC (187 VAC to 253 VAC)
AC line frequency	50/60 Hz
AC line current (per phase)	4.6 A nominal line, full power
AC input power	1050 VA
Overcurrent limit (per phase)	10 A to be created by user through fuse or circuit breaker
Efficiency line to load	57% at full power, nominal line
Power factor	97% to 99% at max power
AC mains connection	IEC 320 at full power

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三、品質(zhì)保障

我們所銷售的電源、匹配器及RPS等如無特殊說明，均提供6個(gè)月的免費(fèi)保修服務(wù)。

我們?yōu)殇N售產(chǎn)品提供終身維修服務(wù)，并可提供EXCHANGE服務(wù)，保證客戶的生產(chǎn)正常進(jìn)行。

四、運(yùn)輸

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我們?yōu)樗谐鰪S的機(jī)器提供最結(jié)實(shí)的包裝，保證運(yùn)輸過程中機(jī)器的安全。

AE CESAR 136 13.56MHz(600W) RF 射頻電源維修及銷售

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應(yīng)用于半導(dǎo)體行業(yè)的相關(guān)同類產(chǎn)品：

AE CESAR 136 Specification
Frequency	13.560 MHz +/- 0.005%
Max output power	600 W into a 50??load
Min output power	6 W into a 50??load
Reflected power limit	200 W
Delivered power into mismatch	33% depending on the load impedance
Load impedance	50?Ω
RF connector	50?Ω, N-type, female
RF power regulation mode	P forward, P delivered, or DC selfbias voltage
Regulation (of set point)	1.0 or 0.1% of full-rated power, whichever is greater, into a 50Ωload
Response time (ms)	\
Turn off/decay time (ms)	\
Harmonics	-50 dBc at full-rated power
Spurious content	-60 dBc max at full-rated power
Pulse mode	Yes
Pulse repetition frequency	1 to 30 kHz
Pulse duty cycle	1% to 99%
Pulse RF envelope rise / fall time (ms)	\
CEX operation mode	Yes
CEX input signal as required	0 to +10 dbm
CEX output signal specifications	+3 to +10 dbm
CEX connector (50??)	BNC, female
Display	LCD graphic display
Display	256 x 132 dots , black / white
Interlocks and Limits
Reflected power	Yes
Overtemperature	Yes
Current limit	Yes
DC overload	Yes
RF power limit	Yes
Cooling
Cooling	Air cooling
Air cooling requirement	118 m/h3
AC Power Line
AC line voltage (1-phase)	230 VAC (187 VAC to 253 VAC)
AC line frequency	50/60 Hz
AC line current (per phase)	4.6 A nominal line, full power
AC input power	1050 VA
Overcurrent limit (per phase)	10 A to be created by user through fuse or circuit breaker
Efficiency line to load	57% at full power, nominal line
Power factor	97% to 99% at max power
AC mains connection	IEC 320 at full power
Physical Specification
Packaging	19" rack cabinet
Mounting	19" rack mounting
Weight	19.5 kg (43 lb)
Clearance	60 mm (2.36") on each side for air flow into unit
Dimensions	88 mm (H) x 483 mm (W) x 500 mm (D)
Dimensions	3.46" (H) x 19" (W) x 19.69" (D)
Interfaces	Interlock
	Matching interface
	Diagnostic interface

AE CESAR 136 13.56MHz(600W) RF 射頻電源 維修及銷售

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AE CESAR 136 13.56MHz(600W) RF 射頻電源維修及銷售

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